Items | Parameters |
Humidity (φ) measurement |
Range: 5 - 95% Accuracy: ± 2% |
Differential pressure transducers |
Range: 4 torr (2 mm Hg) Accuracy: 0.015% |
Mass Flow Transducers |
Range: 5 L/min Accuracy: 1% |
Humidity (φ) control |
Range: 0 - 100% Accuracy: ± 1.5% (φ = 0.5) ± 5% (high & low φ) |
Temperature |
Range: RT - 100 °C Control: ± 2% Accuracy: 0.4 °C (low φ) - 0.8 °C (high φ) at 100 °C |
Mass Flow Controller |
Range: 2000 cc/min Accuracy: 1% |